Modeling of a polyimide diaphragm for an optical pulse pressure sensor

Hasikin, K. and Soin, N. and Ibrahim, F. (2009) Modeling of a polyimide diaphragm for an optical pulse pressure sensor. In: International Conference for Technical Postgraduates 2009, TECHPOS 2009, 2009, Kuala Lumpur.

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This paper presents the modeling of a polyimide diaphragm for an optical pulse pressure sensor. Polyimide is a type of polymer materials that possessed low linear coefficient of thermal expansion and has good thermal stability. The polyimide diaphragm has been designed and its performance is analyzed in terms of diaphragm deflection, diaphragm pressure sensitivity and diaphragm resonance frequency. Two design parameters namely diaphragm radius and diaphragm thickness are varied to study the diaphragm performance. It can be concluded that the modeled micro-diaphragm with a diaphragm radius of 90μm and diaphragm thickness of 4μm respectively has satisfied the maximum allowable deflection and operated in optimum frequency response.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Conference code: 79876 Cited By (since 1996):1 Export Date: 29 January 2014 Source: Scopus Art. No.: 5412059 doi: 10.1109/TECHPOS.2009.5412059 Language of Original Document: English Correspondence Address: Hasikin, K.; Dept. of Biomedical Engineering, University of Malaya Lembah Pantai, 50603 Kuala Lumpur, Malaysia References: Cibula, E., Donlagic, D., Stropnik, C., Miniature fiber optic pressure sensor for medical applications (2002) Applied Optics, 44 (14), pp. 2736-2744; Hill, G.C., Melamud, R., Declercq, F.E., Davenport, A.A., Chan, I.H., Hartwell, P.G., Pruitt, B.L., SU-8 MEMS Fabry-Perot pressure sensor (2007) Sensors and Actuators, A: Physical, 138 (1), pp. 52-62. , DOI 10.1016/j.sna.2007.04.047, PII S0924424707003329; Melamud, R., Davenport, A.A., Hill, G.C., Chan, I.H., Declercq, F., Hartwell, P.G., Pruitt, B.L., Development of an SU-8 fabry-perot blood pressure sensor (2005) 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. , Miami USA, 30 Jan - 3 Feb; Nesson, S., (2007) Miniature Fiber Optic Pressure Sensors for Intervertebral Disc Pressure Measurements in Rodents, , M.Sc. 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Uncontrolled Keywords: Design parameters, Diaphragm deflection, Diaphragm pressure, Linear coefficient of thermal expansion, Maximum allowable deflection, Optical pulse, Optimum frequency, Polymer materials, Resonance frequencies, Thermal stability, Frequency response, Light pulse generators, Organic polymers, Polyimides, Pressure sensors, Pressure transducers, Resonance, Thermal expansion, Thermogravimetric analysis, Diaphragms
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Engineering
Depositing User: Mr Jenal S
Date Deposited: 26 Mar 2014 02:26
Last Modified: 01 Nov 2017 04:04

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