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Abdul Rahman, M.A. and Chiu, W.S. and Haw, C.Y. and Badaruddin, R. and Tehrani, F.S. and Rusop, M. and Khiew, P. and Rahman, S.A. (2017) Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition. Journal of Alloys and Compounds, 721. pp. 70-79. ISSN 0925-8388, DOI https://doi.org/10.1016/j.jallcom.2017.05.289.
Tehrani, F.S. and Badaruddin, M.R. and Rahbari, R.G. and Muhamad, M.R. and Rahman, S.A. (2012) Low-pressure synthesis and characterization of multiphase SiC by HWCVD using CH4/SiH4. Vacuum, 86 (8). pp. 1150-1154. ISSN 0042-207X, DOI https://doi.org/10.1016/j.vacuum.2011.10.022.
