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Rahman, Mohd Azam Abdul and Goh, Boon Tong and Chiu, Wee Siong and Haw, Choon Yian and Mahmood, Mohamad Rusop and Khiew, Poi Sim and Rahman, Saadah Abdul (2018) Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films. Vibrational Spectroscopy, 99. pp. 22-30. ISSN 0924-2031, DOI https://doi.org/10.1016/j.vibspec.2017.11.002.
