Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

Rahman, Mohd Azam Abdul and Goh, Boon Tong and Chiu, Wee Siong and Haw, Choon Yian and Mahmood, Mohamad Rusop and Khiew, Poi Sim and Rahman, Saadah Abdul (2018) Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films. Vibrational Spectroscopy, 99. pp. 22-30. ISSN 0924-2031

Full text not available from this repository.
Official URL: https://doi.org/10.1016/j.vibspec.2017.11.002

Abstract

In this work, the hydrogenated amorphous silicon carbon nitride (a-SiCN:H) thin films were grown by PECVD from the discharge of silane (SiH4), methane (CH4) and nitrogen (N2) gases. Thereafter, the stability of the bonding and microstructural properties with respect to the effects of aging (under atmospheric environment) and thermal annealing (under low and high N2 flow-rates) were investigated by using Fourier transform infrared (FTIR) and micro Raman scattering techniques. Analyses on the as-prepared films showed that the Si[sbnd]H, Si-OH, C[sbnd]H and N[sbnd]H vibrational bonds were stable even through prolong aging while that of Si[sbnd]C[sbnd]N and C[sbnd]N bonds increased and Si[sbnd]N bonds decreased after aging. Meanwhile, low temperature annealing were found to improve the film structure due to the out-diffusion process of N atoms from weak Si[sbnd]N and C[sbnd]N bonds and migration of these N atoms to form strong Si[sbnd]N and C[sbnd]N bonds as well as restructuring of dangling bonds to form new Si[sbnd]C bonds. Additionally, the graphitic phase was more prominent in the film grown at low N2 flow-rate upon annealing, especially when annealed at low temperature. The C[sbnd]N bonds in the graphitic phase were found to be weak and released N atoms even when annealed at low temperature. However, high temperature annealing was shown to remove the graphitic phases in the film structure.

Item Type: Article
Uncontrolled Keywords: Amorphous; Silicon carbon nitride; Thin films; Microstructures; Vibration
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
Divisions: Faculty of Science > Dept of Physics
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 17 Apr 2019 09:02
Last Modified: 17 Apr 2019 09:02
URI: http://eprints.um.edu.my/id/eprint/20979

Actions (login required)

View Item View Item