 | Up a level |
Bakri, A. S. and Nafarizal, N. and Abu Bakar, A. S. and Hasnan, M. M. I. Megat and Raship, N. A. and Omar, W. I. Wan and Azman, Z. and Ali, R. A. Mohamed and Abd Majid, Wan Haliza and Ahmad, M. K. and Aldalbahi, A. (2022) Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering. Journal of Materials Science-Materials in Electronics, 33 (15). pp. 12271-12280. ISSN 0957-4522, DOI https://doi.org/10.1007/s10854-022-08186-w.
