Adhesion and wear behavior of nanostructured titanium oxide thin films

Hasan, M.M. and Haseeb, A.S. Md. Abdul and Masjuki, Haji Hassan and Saidur, Rahman (2010) Adhesion and wear behavior of nanostructured titanium oxide thin films. International Journal of Mechanical and Materials Engineering, 5 (1). pp. 5-10. ISSN 1823-0334,

PDF (Adhesion and wear behavior of nanostructured titanium oxide thin films)
Adhesion_and_wear_behavior_of_nanostructured_titanium_oxide_thin_films.pdf - Published Version

Download (277kB)
Official URL:


This study aims to investigate structural, mechanical and tribological properties of titanium oxide films deposited on glass substrates by radio frequency (RF) magnetron sputtering. All the as-grown titania films possess the anatase structure having a grain size of about 44 nm irrespective of the variation of substrate temperatures. AFM images show a nodular morphology with an increase of surface roughness. From micro-scratch tests, the optical micrographs of the scratch tracks show that the complete delamination of TiO 2 films deposited at higher temperatures appear at a higher value of adhesion critical loads. The highest adhesion critical load between titanium oxide films and glass was found to be 2.24 N for the film prepared at 300 °C. It represents an enhanced adhesion strength for films deposited at higher temperatures. Scratch hardness was also found to increase from 5.5 to 8.4 GPa with increasing substrate temperature. From micro-wear test, it is found that the wear resistance of TiO 2 films deposited at higher substrate temperatures exhibits higher wear resistance.

Item Type: Article
Additional Information: Cited By (since 1996): 3 Export Date: 6 December 2012 Source: Scopus Language of Original Document: English Correspondence Address: Hasan, M. M.; Department of Mechanical Engineering, Department of Engineering, University of Malaya, 50603 Kuala Lumpur, Malaysia; email: References: Beake, B.D., Ranganathan, N., An investigation of the nanoindentation and nano/micro-tribological behaviour of monolayer, bilayer and trilayer coatings on cemented carbide (2006) Materials Science and Engineering A, 423, pp. 46-51; Chen, Y., Dionysiou, D.D., Effect of calcination temperature on the photocatalytic activity and adhesion of TiO 2 films prepared by the P-25 powder-modified sol-gel method (2006) Journal of Molecular Catalysis A: Chemical, 244, pp. 73-82; Chung, C.J., Hsieh, P.Y., Hsiao, C.H., Lin, H.I., Leyland, A., Matthews, A., He, J.L., Mutifunctional arc ion plated TiO 2 photocatalytic coatings with improved wear and corrosion protection (2009) Surface and Coatings Technology, 203, pp. 1689-1693; Eufinger, K., Poelman, D., Poelman, H., Gryse, R.D., Marin, J.B., Effect of microstructure and crystallinity on the photocatalytic activity of TiO 2 thin films deposited by dc magnetron sputtering (2007) Journal of Physics D: Applied Physics, 40, pp. 5232-5238; Fujishima, A., Rao, T.N., Tryk, D.A., Titanium dioxide photocatalysis (2000) Journal of Photochemistry and photobiology C: Photochemistry Reviews, 1 (1), pp. 1-21; Habibi, M.H., Talebian, N., Choi, J.H., The effect of annealing on photocatalytic properties of nanostructured titanium dioxide thin films (2007) Dyes and Pigments, 73, pp. 103-110; Hasan, M.M., Haseeb, A.S.M.A., Saidur R. Masjuki, H.H., Hamdi, M., Influence of substrate and annealing temperatures on optical properties of RF-sputtered TiO 2 thin films (2009) Optical Materials, , Article in press; Hou, Y.Q., Zhuang, D.M., Zhang, G., Zhao, M., Wu, M.S., Influence of annealing temperature on the properties of titanium oxide thin film (2003) Applied Surface Science, 218, pp. 98-106; Jaworski, R., Pawlowski, L., Roudet, F., Kozerski, S., Petit, F., Characterization of mechanical properties of suspension plasma sprayed TiO 2 coatings using scratch test (2008) Surface and Coatings Technology, 202, pp. 2644-2653; Karuppasamy, A., Subrahmanyam, A., Studies on the room temperature growth of nanoanatase phase TiO 2 thin films by pulsed dc magnetron with oxygen as sputter gas (2007) Journal of Applied Physics, 101, pp. 1-7. , 064318; Kuo, D.H., Tzeng, K.H., Growth and properties of titania and aluminum titanate thin films obtained by r.f. magnetron sputtering (2002) Thin Solid Films, 420-421, pp. 497-502; Lackner, J.M., Waldhauser, W., Ebner, R., Major, B., Schoberl, T., Pulsed laser deposition of titanium oxide coatings at room temperature-structural, mechanical and tribological properties (2004) Surface and Coatings Technology, 180-181, pp. 585-590. , DOI 10.1016/j.surfcoat.2003.10.099, PII S025789720301257X; Leng, Y.X., Chen, J.Y., Yang, P., Sun, H., Huang, N., Structure and properties of passivating titanium oxide films fabricated by DC plasma oxidation (2003) Surface and Coatings Technology, 166, pp. 176-182; Malsbender, J., Toonder J.M.J. den, Balkenende, A.R., De With, G., Measuring mechanical properties of coatings: A methodology applied to nano-particle-filled sol-gel coatings on glass (2002) Materials science and Engineering R, 36, pp. 47-103; Okada, M., Tazawa, M., Jin, P., Yamada, Y., Yoshimura, K., Fabrication of photocatalytic heat-mirror with TiO 2/TiN/ TiO 2 stacked layers (2006) Vacuum, 80, pp. 732-735; Pulker, H.K., (1999) Coatings on Glass, , Elsevier, Amsterdam, Netherlands; Sun, H., Wang, C., Pang, S., Li, X., Tao, Y., Tang, H., Liu, M., Photocatalytic TiO 2 films prepared by chemical vapor deposition at atmosphere pressure (2008) Journal of Non-Crystalline Solids, 354, pp. 1440-1443; Sung, Y.M., Kim, H.J., Sputter deposition and surface treatment of TiO 2 films for dye-sensitized solar cells using reactive RF plasma (2007) Thin Solid Films, 515, pp. 4996-4999; Tomaszewski, H., Eufinger, K., Poelman, H., Poelman, D., Gryse, R.D., Smet, P.F., Marin, G.B., Effect of substrate sodium content on crystallization and photocatalytic activity of TiO 2 films prepared by dc magnetron sputtering (2007) International Journal of Photoenergy, 1, pp. 1-5. , 95213; Wang, Z., Helmersson, U., Käll, P.O., Optical properties of anatase TiO 2 thin films prepared by aqueous sol-gel process at low temperature (2002) Thin Solid Films, 405, pp. 50-54; Yang, C., Fan, H., Xi, Y., Chen, J., Li, Z., Effects of depositing temperatures on structure and optical properties of TiO 2 film deposited by ion beam assisted electron beam evaporation (2008) Applied Surface Science, 254, pp. 2685-2689; Yang, W., Wolden, C.A., (2006) Thin Solid Films, 515, pp. 1708-1713; Ye, Q., Liu, P.Y., Tang, Z.F., Zhai, L., Hydrophilic properties of nano-TiO 2 thin films deposited by RF magnetron sputtering (2007) Vacuum, 81, pp. 627-631; Zhang, Y., Ma, X., Chen, P., Yang, D., Effect of the substrate temperature on the crystallization of TiO 2 films prepared by DC reactive magnetron sputtering (2007) Journal of Crystal Growth, 300 (2), pp. 551-554. , DOI 10.1016/j.jcrysgro.2007.01.008, PII S0022024807001017
Uncontrolled Keywords: Adhesion strength; Scratch hardness; Structural properties; Tribological properties.
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Engineering
Depositing User: Mr Jenal S
Date Deposited: 05 Jul 2013 09:03
Last Modified: 18 Oct 2018 03:54

Actions (login required)

View Item View Item