Design and analysis of MEMS high sensitive capacitive pressure sensor

Ali, M. and Soin, N. and Noorakma, A.C.W. and Yusof, N. and Hatta, S.F.W.M. (2016) Design and analysis of MEMS high sensitive capacitive pressure sensor. Journal of Engineering and Applied Sciences, 11 (12). pp. 2688-2692. ISSN 1816-949X, DOI

Full text not available from this repository.
Official URL:


In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compared to understand the sensitivity and deflection of the sensors. The pressure sensor was designed to evaluate the pressure in ranges of 0-60 mmHg which is in the range of Intraocular Pressure (IOP) for glaucoma. The capacitive pressure sensor is design using different structures of the diaphragm and it is identified that 4 slotted square diaphragms gives the highest sensitivities amongst the presented design. By coating the diaphragm and adding slots into the diaphragm, the displacement improves while mechanical and capacitance sensitivities increase.

Item Type: Article
Funders: University of Malaya and the collaboration with Universiti Sultan Zainal Abidin under research grant PRPUM (CG023-2014) and RAGS grant (RAGS/2013/UNNISZA/SGO2/1)
Uncontrolled Keywords: Capacitive pressure sensor; Clamped and slotted haphragm; Glaucoma; Intraocular pressure; MEMS; Sensitivity
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Engineering
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 13 Nov 2017 01:38
Last Modified: 13 Nov 2017 01:38

Actions (login required)

View Item View Item