Hasan, M.M. and Haseeb, A.S. Md. Abdul and Masjuki, Haji Hassan and Saidur, R. and Hamdi, M. (2010) Influence of substrate temperatures on structural, morphological and optical properties of rf-sputtered anatase TiO2 films. Arabian Journal for Science and Engineering, 35 (1C). pp. 147-156. ISSN 1319-8025,
Full text not available from this repository.Abstract
In this investigation, TiO2 thin films were deposited on glass substrates at varying substrate temperatures from room temperature to 300 degrees C by radio-frequency (RF) magnetron sputtering at an elevated sputtering pressure of 3 Pa. As-deposited TiO2 films were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), field emission Auger electron microscopy (FEAES), and UV-visible-NIR spectrophotometry. The XRD results reveal that all the as-deposited films possessing the anatase structure and crystallinity of TiO2 films appears to deteriorate slightly at higher substrate temperatures. The crystallite size of the as-deposited films at different substrate temperatures is similar to 44 nm, which shows insignificant variation. AFM images exhibit a similar type of nodular morphology in the as-grown films. TiO2 films deposited at different substrate temperatures exhibit high visible transmittance and a high refractive index ranging from 2.31 to 2.37 at a wavelength of 550 nm. The optical band gap of the films has been estimated to be in the range from 3.39 to 3.42 eV.
| Item Type: | Article |
|---|---|
| Funders: | UNSPECIFIED |
| Additional Information: | Hasan, M. M. Haseeb, A. S. M. A. Masjuki, H. H. Saidur, R. Hamdi, M. |
| Uncontrolled Keywords: | Titanium dioxide radio-frequency (rf) sputtering structural properties optical properties chemical-vapor-deposition thin-films photocatalytic activity annealing temperature microstructure fabrication constants thickness pressure plasma |
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) |
| Divisions: | Faculty of Engineering |
| Depositing User: | Mr. Mohammed Salim Abd Rahman |
| Date Deposited: | 17 Apr 2013 02:41 |
| Last Modified: | 17 Oct 2018 01:06 |
| URI: | http://eprints.um.edu.my/id/eprint/5744 |
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