Zhang, Qiaozhen and Chen, Mingzhu and Liu, Huiling and Zhao, Xiangyong and Qin, Xiaomei and Wang, Feifei and Tang, Yanxue and Yeoh, Keat Hoe and Chew, Khian-Hooi and Sun, Xiaojuan (2021) Deposition, characterization, and modeling of scandium-doped aluminum nitride thin film for piezoelectric devices. Materials, 14 (21). ISSN EISSN 1996-1944, DOI https://doi.org/10.3390/ma14216437.
Full text not available from this repository.Abstract
In this work, we systematically studied the deposition, characterization, and crystal structure modeling of ScAlN thin film. Measurements of the piezoelectric device's relevant material properties, such as crystal structure, crystallographic orientation, and piezoelectric response, were performed to characterize the Sc0.29Al0.71N thin film grown using pulsed DC magnetron sputtering. Crystal structure modeling of the ScAlN thin film is proposed and validated, and the structure-property relations are discussed. The investigation results indicated that the sputtered thin film using seed layer technique had a good crystalline quality and a clear grain boundary. In addition, the effective piezoelectric coefficient d(33) was up to 12.6 pC/N, and there was no wurtzite-to-rocksalt phase transition under high pressure. These good features demonstrated that the sputtered ScAlN is promising for application in high-coupling piezoelectric devices with high-pressure stability.
| Item Type: | Article |
|---|---|
| Funders: | National Natural Science Foundation of China (NSFC) [11904233], National Natural Science Youth Foundation of China [52172005], cience & Technology Commission of Shanghai Municipality (STCSM) [19070502800] |
| Uncontrolled Keywords: | Piezoelectric thin film; Scandium-doped aluminum nitride; Crystal structure; First-principles calculation |
| Subjects: | Q Science > QC Physics Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) T Technology > TN Mining engineering. Metallurgy |
| Divisions: | Faculty of Science > Department of Physics |
| Depositing User: | Ms Zaharah Ramly |
| Date Deposited: | 09 Jun 2022 02:25 |
| Last Modified: | 09 Jun 2022 02:25 |
| URI: | http://eprints.um.edu.my/id/eprint/34408 |
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