Micro-diaphragm performance analysis for polyimide diaphragm

Hasikin, K. and Soin, N. and Ibrahim, F. (2010) Micro-diaphragm performance analysis for polyimide diaphragm. In: 2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010, 2010, Melaka .

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Abstract

This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency. © 2010 IEEE.

Item Type:	Conference or Workshop Item (Paper)
Funders:	UNSPECIFIED
Additional Information:	Conference code: 81769 Export Date: 29 January 2014 Source: Scopus Art. No.: 5549367 doi: 10.1109/SMELEC.2010.5549367 Language of Original Document: English Correspondence Address: Hasikin, K.; Department of Biomedical Engineering, Faculty of Engineering, University of Malaya, 50603, Kuala Lumpur, Malaysia References: Cibula, E., Donlagic, D., Stropnik, C., Miniature fiber optic pressure sensor for medical applications (2002) Applied Optics, 44 (14), pp. 2736-2744; Hill, G.C., Melamud, R., Declercq, F.E., Davenport, A.A., Chan, I.H., Hartwell, P.G., Pruitt, B.L., SU-8 MEMS fabry-perot pressure sensor (2007) Sensors and Actuators A:Physical, 138 (1), pp. 52-62; Melamud, R., Davenport, A.A., Hill, G.C., Chan, I.H., Declercq, F., Hartwell, P.G., Pruitt, B.L., Development of an SU-8 fabry-perot blood pressure sensor (2005) 18 th IEEE International Conference on Micro Electro Mechanical Systems; Nesson, S., (2007) Miniature Fiber Optic Pressure Sensors for Intervertebral Disc Pressure Measurements in Rodents, , M.Sc. USA: University of Maryland, College Park; Giovanni, M.D., (1982) Flat and Corrugated Diaphragm Design Handbook, , Marcel Dekker, Inc; Xiao, Z., Engstrom, O., Vidovic, N., Diaphragm deflection of silicon interferometer structures used as pressure sensors (1997) Sensors and Actuators A, 58, pp. 99-107; Zheng, N., Shi, C., Wang, D., Zhang, M., Liao., Y., Diaphragm-type fiber optic interferometric acoustic sensor (2003) Optical Engineering, 42 (9), pp. 2558-2562; Yu, M., (2002) Fiber-optic Sensor Systems for Acoustic Measurements, , PhD Dissertation, University of Maryland, College Park; Yu, M., Balachandran, B., Acoustic measurements using a fiber-optic sensor systems (2003) Journal of Intelligent Material Systems and Strctures, 14 (7), pp. 409-414; Xu, J., (2005) High Temperature High Bandwidth Fiber Optic Pressure Sensors, , Ph.D. Blacksburg, Virginia: Virginia Polytechnic and State University; Deng, J., (2004) Development of Novel Optical Fiber Interferometric Sensors with High Sensitivity for Acoustic Emission Detection, , Dissertation submitted to Virginia Polytechnic Institute; Sheplak, M., Dugundji, J., Large deflections of clamped circular plates under initial tension and transitions to membrane behavior (1998) ASME Journal of Applied Mechanics, 65 (1), pp. 107-115; Cibula, E., Donlagic, D., Stropnik, C., Miniature fiber optic pressure sensor for medical applications (2002) Applied Optics, 44 (14), pp. 2736-2744; Shin, J.W., Chung, S.W., Kim, Y.K., Choi, B.K., Design and fabrication of micromirror array support by vertical springs (1998) Sensors & Actuators A, 66, pp. 144-149; Chiang, C.-C., Lin, C.-C.K., Ju, M.-S., An implantable capacitive pressure sensor for biomedical applications (2007) Sensors and Actuators A, 134, pp. 382-388; Cui, B., Cortot, Y., Veres, T., Polyimide nanostructures fabricated by nanoimprint litography and its applications (2006) Microelectronic Engineering, 83, pp. 906-909; Wang, X., Li, B., Russo, O.L., Roman, H.T., Chin, K.K., Farmer, K.R., Diaphragm design guidelines and an optical pressure sensor based on MEMS technique (2006) Microelectronic Journal, 37, pp. 50-56; Meirovitch, L., (1997) Principles and Techniques of Vibrations, , Englewood Cliff, NJ: Prentice Hall; Timoshenko, S.P., Kreiger, S.W., (1959) Theory of Plates and Shells, , 2nd Ed, McGraw Hill International Book Company; Le, H.P., Shah, K., Singh, J., Zayegh, A., Design and Implementation of an optimised wireless pressure sensor for biomedical application (2006) Analog Interg Circ. Sig. Process, 48, pp. 21-31; Madssen, P., Haere, R., Wiseth, Radial artery diameter and vasodilatory properties after transradial coronary angiography (2006) Ann Thorac Surg, 82, pp. 1698-1703; Hasikin, K., Soin, N., Ibrahim, F., Modeling of an optical diaphragm for human pulse pressure detection (2009) Journal of World Scientific Engineering Association Society (WSEAS) Transaction on Electronic, 5 (11), pp. 447-456; Hasikin, K., Soin, N., Ibrahim, F., Modeling of a polyimide diaphragm for an optical pulse pressure sensor (2009) International Conference for Technical Postgraduates (TECHPOS) Sponsors: Silterra Malaysia Sdn Bhd; IC Microsystems (ICMIC) Sdn Bhd
Uncontrolled Keywords:	Flexural rigidities, Optimum performance, Performance analysis, Pulse pressure, Resonance frequencies, Frequency response, Polyimides, Resonance, Diaphragms
Subjects:	T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General)
Divisions:	Faculty of Engineering
Depositing User:	Mr Jenal S
Date Deposited:	07 Apr 2014 02:49
Last Modified:	01 Nov 2017 04:11
URI:	http://eprints.um.edu.my/id/eprint/9302

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