Influence of substrate temperatures on structural, morphological and optical properties of rf-sputtered anatase TiO2 films

Hasan, M.M. and Haseeb, A.S. Md. Abdul and Masjuki, Haji Hassan and Saidur, R. and Hamdi, M. (2010) Influence of substrate temperatures on structural, morphological and optical properties of rf-sputtered anatase TiO2 films. Arabian Journal for Science and Engineering, 35 (1C). pp. 147-156. ISSN 1319-8025

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Abstract

In this investigation, TiO2 thin films were deposited on glass substrates at varying substrate temperatures from room temperature to 300 degrees C by radio-frequency (RF) magnetron sputtering at an elevated sputtering pressure of 3 Pa. As-deposited TiO2 films were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), field emission Auger electron microscopy (FEAES), and UV-visible-NIR spectrophotometry. The XRD results reveal that all the as-deposited films possessing the anatase structure and crystallinity of TiO2 films appears to deteriorate slightly at higher substrate temperatures. The crystallite size of the as-deposited films at different substrate temperatures is similar to 44 nm, which shows insignificant variation. AFM images exhibit a similar type of nodular morphology in the as-grown films. TiO2 films deposited at different substrate temperatures exhibit high visible transmittance and a high refractive index ranging from 2.31 to 2.37 at a wavelength of 550 nm. The optical band gap of the films has been estimated to be in the range from 3.39 to 3.42 eV.

Item Type: Article
Additional Information: Hasan, M. M. Haseeb, A. S. M. A. Masjuki, H. H. Saidur, R. Hamdi, M.
Uncontrolled Keywords: Titanium dioxide radio-frequency (rf) sputtering structural properties optical properties chemical-vapor-deposition thin-films photocatalytic activity annealing temperature microstructure fabrication constants thickness pressure plasma
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Engineering
Depositing User: Mr. Mohammed Salim Abd Rahman
Date Deposited: 17 Apr 2013 02:41
Last Modified: 17 Oct 2018 01:06
URI: http://eprints.um.edu.my/id/eprint/5744

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