Microstructural and optical properties of ZrON/Si thin films

Atuchin, V.V. and Kruchinin, V.N. and Wong, Y.H. and Cheong, K.Y. (2013) Microstructural and optical properties of ZrON/Si thin films. Materials Letters, 105. pp. 72-75. ISSN 0167-577X

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Official URL: http://www.sciencedirect.com/science/article/pii/S...

Abstract

ZrON/Si(100) layer structure formation has been produced by oxidation/nitridation of sputtered Zr metal in N2O/Ar ambient at 500–900 °C. Micromorphology and structural properties of the films have been evaluated by scanning electron microscopy, atomic force microscopy, and reflection high-energy electron diffraction. Dispersive optical properties of the ZrON/Si reflection system have been studied with spectroscopic ellipsometry. A drastic increase of SiO2-based interface layer thickness has been found at 700–900 °C.

Item Type: Article
Uncontrolled Keywords: ZrON/Si structure; SEM; AFM; Spectroscopic ellipsometry
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Engineering
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 11 Mar 2015 03:59
Last Modified: 11 Mar 2015 03:59
URI: http://eprints.um.edu.my/id/eprint/13006

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