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Khodami, Maryam and Hirbodvash, Zohreh and Krupin, Oleksiy and Wong, Wei Ru and Lisicka-Skrzek, Ewa and Northfield, Howard and Hahn, Choloong and Berini, Pierre (2021) Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing. Journal of Microelectromechanical Systems, 30 (5). pp. 686-695. ISSN 1057-7157, DOI https://doi.org/10.1109/JMEMS.2021.3097701.
Sabri, M.F.M. and Ono, T. and Said, S.M. and Kawai, Y. and Esashi, M. (2015) Fabrication and characterization of microstacked PZT actuator for MEMS applications. Journal of Microelectromechanical Systems, 24 (1). pp. 80-90. ISSN 1057-7157, DOI https://doi.org/10.1109/Jmems.2014.2317495.
