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Abd Rahman, Mohd Nazri and Zuhdi, Ahmad Wafi Mahmood and Amirulddin, Ungku Anisa Ungku and Isah, Mustapha and Azman, Nurul Izzati and Arsad, Akmal Zaini and Arzaee, Nurul Affiqah and Mansor, Marwan and Shuhaimi, Ahmad (2024) Effect of deposition regime transition on the properties of Al:ZnO transparent conducting oxide layer by radio frequency magnetron sputtering system. Ceramics International, 50 (21, B). pp. 43070-43081. ISSN 0272-8842, DOI https://doi.org/10.1016/j.ceramint.2024.08.158.
Abd Samad, Muhammad Izzuddin and Noor, Mimiwaty Mohd and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Mansor, Marwan and Zuhdi, Ahmad Wafi Mahmood and Hamzah, Azrul Azlan and Latif, Rhonira (2023) Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films. Scripta Materialia, 226. ISSN 1359-6462, DOI https://doi.org/10.1016/j.scriptamat.2022.115228.
