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Abd Samad, Muhammad Izzuddin and Badrudin, Syazwani Izrah and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Yusop, Mohd Zamri and Latif, Rhonira (2025) Thin film sputter-deposition of AlN crystals in oxygenated chamber: a pilot study. Materials Research Express, 12 (1). 011501. ISSN 2053-1591, DOI https://doi.org/10.1088/2053-1591/ad9b70.