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Yusof, Norliana and Bais, Badariah and Yeop Majlis, Burhanuddin and Soin, Norhayati and Yunas, Jumril (2019) Optimization of KOH etching process for MEMS square diaphragm using response surface method. Indonesian Journal of Electrical Engineering and Computer Science, 15 (1). pp. 113-121. ISSN 2502-4752, DOI https://doi.org/10.11591/ijeecs.v15.i1.pp113-121.