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Hisyam, Muhammad Iznul and Shuhaimi, Ahmad and Norhaniza, Rizuan and Mansor, Marwan and Williams, Adam and Hussin, Mohd Rofei Mat (2024) Study of AlN Epitaxial Growth on Si (111) Substrate Using Pulsed Metal-Organic Chemical Vapour Deposition. Crystals, 14 (4). p. 371. ISSN 2073-4352, DOI https://doi.org/10.3390/cryst14040371.