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Tarek, Ahmad Hafiz Jafarul and Lai, Chin Wei and Abdul Razak, Bushroa and Wong, Yew Hoong (2022) Physical vapour deposition of Zr-based nano films on various substrates: A review. Current Nanoscience, 18 (3). pp. 347-366. ISSN 1573-4137, DOI https://doi.org/10.2174/1573413717666210809105952.