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Shariatmadar Tehrani, F. and Goh, B.T. and Muhamad, M.R. and Rahman, Saadah Abdul (2012) Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases. Journal of Materials Science: Materials in Electronics, 24 (4). pp. 1-8. ISSN 0957-4522, DOI https://doi.org/10.1007/s10854-012-0934-z.
