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Samad, Muhammad Izzuddin Abd and Badrudin, Syazwani Izrah and Ponnuthurai, Darven Raj and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Latif, Rhonira (2024) Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride ⟨100⟩ thin film growth using ceramic target. Journal of Materials Research and Technology-JMR&T, 29. pp. 2248-2257. ISSN 2238-7854, DOI https://doi.org/10.1016/j.jmrt.2024.01.286.