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Bakri, Anis Suhaili and Nayan, Nafarizal and Soon, Chin Fhong and Ahmad, Mohd Khairul and Abu Bakar, Ahmad Shuhaimi and Abd Majid, Wan Haliza and Raship, Nur Amaliyana (2021) Structural and mechanical properties of a-axis AlN thin films growth using reactive RF magnetron sputtering plasma. Microelectronics International, 38 (3). pp. 99-104. ISSN 1356-5362, DOI https://doi.org/10.1108/MI-02-2021-0015.