Items where Author is "Ono, T."

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Sabri, M.F.M. and Ono, T. and Said, S.M. and Kawai, Y. and Esashi, M. (2015) Fabrication and characterization of microstacked PZT actuator for MEMS applications. Journal of Microelectromechanical Systems, 24 (1). pp. 80-90. ISSN 1057-7157, DOI https://doi.org/10.1109/Jmems.2014.2317495.

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