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Megat Hasnan, M. M. and Nayan, N. and Ahmad, M. K. and Mohd Zin, R. and Fhong, S. C. and Suhana, Mohd Said and Mohamed Ali, M. S. and Mohd Sabri, M. F. and Mohamad, K. A. and Mohd Salleh, M. F. Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing. Semiconductor Science and Technology, 36 (11). ISSN 0268-1242, DOI https://doi.org/10.1088/1361-6641/ac22f3.