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Mansor, Mazwan and Syamsul, M. and Yusuf, Yusnizam and Rahman, Mohd Nazri Abdul (2023) Atomic structure for AlN grown on different plane orientation of sapphire via numerical study. Microelectronics International, 40 (1, SI). pp. 46-52. ISSN 1356-5362, DOI https://doi.org/10.1108/MI-04-2022-0065.