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Zhang, Qiaozhen and Chen, Mingzhu and Liu, Huiling and Zhao, Xiangyong and Qin, Xiaomei and Wang, Feifei and Tang, Yanxue and Yeoh, Keat Hoe and Chew, Khian-Hooi and Sun, Xiaojuan (2021) Deposition, characterization, and modeling of scandium-doped aluminum nitride thin film for piezoelectric devices. Materials, 14 (21). ISSN EISSN 1996-1944, DOI https://doi.org/10.3390/ma14216437.
