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Wahab, Yasmin Abdul and Fadzil, Anuar and Soin, Norhayati and Fatmadiana, Sharifah and Chowdhury, Zaira Zaman and Hamizi, Nor Aliya and Pivehzhani, Omid Akbarzadeh and Sabapathy, Thennarasan and Al-Douri, Yarub (2019) Uniformity improvement by integrated electrochemical-plating process for CMOS logic technologies. Journal of Manufacturing Processes, 38. pp. 422-431. ISSN 1526-6125, DOI https://doi.org/10.1016/j.jmapro.2019.01.025.
