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Abd Samad, Muhammad Izzuddin and Badrudin, Syazwani Izrah and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Yusop, Mohd Zamri and Latif, Rhonira (2025) Thin film sputter-deposition of AlN crystals in oxygenated chamber: a pilot study. Materials Research Express, 12 (1). 011501. ISSN 2053-1591, DOI https://doi.org/10.1088/2053-1591/ad9b70.
Abd Samad, Muhammad Izzuddin and Badrudin, Syazwani Izrah and Ponnuthurai, Darven Raj and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Latif, Rhonira (2024) Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride (100) thin film growth using ceramic target. Journal of Materials Research and Technology-JMR&T, 29. pp. 2248-2257. ISSN 2238-7854, DOI https://doi.org/10.1016/j.jmrt.2024.01.286.
Samad, Muhammad Izzuddin Abd and Badrudin, Syazwani Izrah and Ponnuthurai, Darven Raj and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Latif, Rhonira (2024) Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride ⟨100⟩ thin film growth using ceramic target. Journal of Materials Research and Technology-JMR&T, 29. pp. 2248-2257. ISSN 2238-7854, DOI https://doi.org/10.1016/j.jmrt.2024.01.286.
