![]() | Up a level |
Annuar, Nurul Zieyana Mohamed and Sabri, Mohd Faizul Mohd and Shuhaimi, Ahmad (2015) Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber. Microsystem Technologies, 21 (1). pp. 309-318. ISSN 0946-7076, DOI https://doi.org/10.1007/s00542-013-2046-y.