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Abd Samad, Muhammad Izzuddin and Badrudin, Syazwani Izrah and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Yusop, Mohd Zamri and Latif, Rhonira (2025) Thin film sputter-deposition of AlN crystals in oxygenated chamber: a pilot study. Materials Research Express, 12 (1). 011501. ISSN 2053-1591, DOI https://doi.org/10.1088/2053-1591/ad9b70.
Abd Samad, Muhammad Izzuddin and Badrudin, Syazwani Izrah and Ponnuthurai, Darven Raj and Mansor, Marwan and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Latif, Rhonira (2024) Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride (100) thin film growth using ceramic target. Journal of Materials Research and Technology-JMR&T, 29. pp. 2248-2257. ISSN 2238-7854, DOI https://doi.org/10.1016/j.jmrt.2024.01.286.
Abd Samad, Muhammad Izzuddin and Noor, Mimiwaty Mohd and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Mansor, Marwan and Zuhdi, Ahmad Wafi Mahmood and Hamzah, Azrul Azlan and Latif, Rhonira (2023) Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films. Scripta Materialia, 226. ISSN 1359-6462, DOI https://doi.org/10.1016/j.scriptamat.2022.115228.
