Growth of Al-doped ZnO nanostructures in low pressure background gas by pulsed laser deposition

Kek, Reeson and Ong, Guang Liang and Yap, Seong Ling and Lim, Lian Kuang and Koh, Song Foo and Nee, Chen Hon and Tou, Teck Yong and Yap, Seong Shan (2022) Growth of Al-doped ZnO nanostructures in low pressure background gas by pulsed laser deposition. Materials Science in Semiconductor Processing, 145. ISSN 1369-8001, DOI

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In this work, the deposition of nanostructures by room temperature pulsed laser deposition (PLD) in low pressure (2.6 Pa) O-2, N-2, He, and Ar at different substrate positions are studied. The substrates are placed at the normal onaxis/center position; and off-axis i.e. 4.5 cm above and below the center position. Optical emission spectra and ion velocity are measured by using spectrometer and ion probe. The overall intensity of optical emission is in the order of Ar > O-2/N-2 > He while the ion velocity is in the reverse order. The inverse relation of optical emission and ion velocity suggest that collisions of the ablated specie possibly result in strong emission and impede the ion velocity at the same time. Amorphous films are obtained for the substrates placed at on-axis/center in all the background gases and at the bottom position for O-2. However, crystalline ZnO and Zn nanostructures are deposited at the bottom position in N-2, He, and Ar. Larger structures are deposited in Ar and the presence of nanorods are detected by TEM. The results further suggest that in N-2, He or Ar, the ablated plasma plume is spatially and thermally confined; governed by the properties of the gas. Nucleation of nanostructures occurred in the plasma plume even at low background pressure and deposited on the substrates that are placed at the bottom position. Between the two inert gases, Ar with higher atomic mass and lower thermal conductivity results in high collisions and thermal confinement that leads to some large structure as compared to those obtained in He. In addition, in the presence of N-2, He or Ar, Zn crystallites are also detected, which can act as catalyst for nano structure formation.

Item Type: Article
Funders: Ministry of Higher Education, Fundamental Research Grant Scheme (FRGS) [Grant No: FRGS/1/2018/STG02/UM/02/8], Multimedia University [Grant No: MMUI/210078 & MMUI/180025], Sandisk/Western Digital Malaysia
Uncontrolled Keywords: ZnO nanostructures; ZnO thin Films; On/off; Axis deposition; Pulsed laser deposition; Background gases; Time of flight; Optical emission spectra
Subjects: Q Science > QC Physics
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Science > Department of Physics
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 28 Sep 2023 13:47
Last Modified: 28 Sep 2023 13:47

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