Graham, W.G. and Mouncey, S. and Nor, Roslan Md and Wang, L. (1995) Detection of atoms sputtered from surfaces. Key Engineering Materials, 99-100. pp. 371-376. ISSN 1013-9826, DOI https://doi.org/10.4028/www.scientific.net/KEM.99-100.371.
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Official URL: https://www.scientific.net/KEM.99-100.371
Abstract
The energy distributions of sputtered atoms and ions produced by few hundred to few thousand eV ion bombardment by both atomic and molecular ion beams of polycrystalline and crystalline targets by has been measured. The energy distributions of the ions and atoms are found to be different and quite complex. The distributions provide information about the basic sputtering mechanisms which occur in plasma-surface interactions.
| Item Type: | Article |
|---|---|
| Funders: | UNSPECIFIED |
| Uncontrolled Keywords: | Atoms; Crystals; Energy transfer; Ion bombardment; Plasma applications; Polycrystals; Sputtering; Surface properties; Energy distribution; Solid state physics |
| Subjects: | Q Science > QC Physics |
| Divisions: | Faculty of Science > Department of Physics |
| Depositing User: | miss munirah saadom |
| Date Deposited: | 10 Jul 2013 04:17 |
| Last Modified: | 21 Aug 2019 08:40 |
| URI: | http://eprints.um.edu.my/id/eprint/7853 |
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