Hashwan, Saeed S. Ba S. and Khir, Mohd Haris Md. and Nawi, Illani Mohd and Ahmad, Mohamad Radzi and Hanif, Mehwish and Zahoor, Furqan and Al-Douri, Yarub and Algamili, Abdullah Saleh and Bature, Usman Isyaku and Alabsi, Sami Sultan and Sabbea, Mohammed O. Ba and Junaid, Muhammad (2023) A review of piezoelectric MEMS sensors and actuators for gas detection application. Discover Nano, 18 (1). ISSN 2731-9229, DOI https://doi.org/10.1186/s11671-023-03779-8.
Full text not available from this repository.Abstract
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.
| Item Type: | Article |
|---|---|
| Funders: | Centre of Graduate Studies (CGS) in Universiti Teknologi PETRONAS, Universiti Teknologi Petronas, Yayasan UTP [Grant no. 015LC0-181, 015LCO-181] |
| Uncontrolled Keywords: | Microelectromechanical system (MEMS); Gas sensors; Piezoelectric actuators; Sensing principle; Microcantilever; QCM; SAW; BAW; PMUT; FBAR; Sensing layers |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Deputy Vice Chancellor (Research & Innovation) Office > Nanotechnology & Catalysis Research Centre |
| Depositing User: | Ms. Juhaida Abd Rahim |
| Date Deposited: | 23 Oct 2025 21:39 |
| Last Modified: | 23 Oct 2025 21:39 |
| URI: | http://eprints.um.edu.my/id/eprint/48376 |
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