Radio frequency magnetron sputtering growth of Ni-doped ZnO thin films with nanocolumnar structures

Mazwan, M. and Ng, S. S. and Baharin, M. S. N. Samsol and Pakhuruddin, M. Z. and Abu Bakar, A. S. and Rahman, M. N. Abd. and Al-Zuhairi, O. and Abd Rahim, A. F. (2024) Radio frequency magnetron sputtering growth of Ni-doped ZnO thin films with nanocolumnar structures. Journal of Crystal Growth, 644. p. 127835. ISSN 0022-0248, DOI https://doi.org/10.1016/j.jcrysgro.2024.127835.

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Abstract

This study describes the RF magnetron sputtering growth of nickel (Ni) doped zinc oxide (ZnO) thin films with nanocolumns (NCs) structures. Using a nickel seed layer, homogeneous and vertically aligned ZnO nanocolumns with a diameter of around 30 nm were successfully grown. The X-ray diffraction (XRD) results confirmed the incorporation of Ni atoms into the ZnO lattice, producing single crystalline structures without secondary phases. High-resolution transmission electron microscopy showed clear lattice planes with a d-spacing value of 3.243 & Aring; corresponding to the wurtzite phase of ZnO. Optimal crystalline quality was achieved by growing the films at 300 degrees C followed by thermal annealing at 300-500 degrees C in an oxygen ambient.

Item Type: Article
Funders: Ministry of Education, Malaysia (A305-KR-AKH002-0000000435-K134), Universiti Sains Malaysia, Research University Individual (RUI) Special Grant Scheme (UO2027) ; (2022/0031) ; (1001/CINOR/8011141)
Uncontrolled Keywords: Nanocolumnar; Nickel seed layer; Catalyst; Magnetron sputtering; Dopant
Subjects: Q Science > QC Physics
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Science > Department of Physics
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 09 Apr 2025 06:22
Last Modified: 09 Apr 2025 06:22
URI: http://eprints.um.edu.my/id/eprint/46710

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