Algamili, Abdullah S. and Abidin, Zamri Zainal and Khir, Mohd Haris Bin Md. and Ahmed, Abdelaziz Yousif and Hashwan, Saeed S. Ba and Isyaku, Usman Bature and Al-Dhawi, Bakr Naser and Salem, Ali Ahmed (2024) Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor. IEEE Access, 12. pp. 26506-26518. ISSN 2169-3536, DOI https://doi.org/10.1109/ACCESS.2024.3365191.
Full text not available from this repository.Abstract
Environmental monitoring for the detection and regulation of toxic gases is of paramount importance. This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide ( TiO2 ) nanoparticles has been incorporated onto the top sensor's surface, amplifying its detection sensitivity. The study delves into Electrothermal mechanisms that has integrated with the embedded microheater to induce thermal forces. This enhancement significantly improves the acetone gas detection capabilities of the device with high sensitivity and low detection limit. Results include the displacement amplitude of the uncoated PolyMUMPs sensor, with exploration of the coated device's behavior under different heating voltages. Electrothermal actuation is employed, and the output voltage is measured using an MS3110 universal capacitive readout circuit. Comparisons of uncoated and coated devices has been investigated, demonstrating the influence of the sensing material that improve the detection performance. This investigation delves into the impact of varying coating thickness on the PolyMUMPs sensor's performance. The mass sensitivity of the device is found to be 3.8574 mHz/pg, while the detection limit indicates that the device can detect up to 44 part per billion (ppb) at resonance frequency of 7.627 kHz.
| Item Type: | Article |
|---|---|
| Funders: | UNSPECIFIED |
| Uncontrolled Keywords: | Characterization; electrothermal actuation; fabrication technology; gas detection; MEMS devices; PolyMUMPs sensor; resonance frequency |
| Subjects: | Q Science > QC Physics T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Science > Department of Physics |
| Depositing User: | Ms. Juhaida Abd Rahim |
| Date Deposited: | 13 Nov 2024 02:47 |
| Last Modified: | 13 Nov 2024 02:47 |
| URI: | http://eprints.um.edu.my/id/eprint/45837 |
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