Van Toan, Nguyen and Ito, Keisuke and Tuoi, Truong Thi Kim and Toda, Masaya and Chen, Po -Hung and Mohd Sabri, Mohd Faizul and Li, Jinhua and Ono, Takahito (2022) Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator. Energy Conversion and Management, 267. ISSN 0196-8904, DOI https://doi.org/10.1016/j.enconman.2022.115923.
Full text not available from this repository.Abstract
This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching (MACE) for heat dissipation enhancement to improve the performance of the micro-thermoelectric generator (mu-TEG). The heat dissipation through the micro-heat sink is enhanced by increasing the surface-to -volume ratio, which can be achieved by combining deep reactive ion etching (RIE) and MACE. Silicon nano -wires with a diameter of 100 nm and a height of 9 mu m are successfully formed in both horizontal and vertical surface directions. The micro-heat sink effectiveness is 8.3 times better than that of without employing the micro -heat sink. In addition, the performance of the mu-TEG has been significantly enhanced by utilizing the micro-heat sink. The maximum output power of the mu-TEG with and without the micro-heat sink are 93 mu W and 18.5 mu W, respectively, under the same evaluation conditions. The findings in this work may be useful not only for the mu-TEG, but also other applications such as micro-supercapacitors, micro-sensors, chemical analysis, and bio-logical processes, which require a large surface-to-volume ratio.
| Item Type: | Article |
|---|---|
| Funders: | Cabinet Office, Government of Japan, Cross -ministerial Strategic Innovation Promotion Program (SIP), New Energy and Industrial Technology Development Organization (NEDO), Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT) Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research (KAKENHI) (Grant No: 20K15147) |
| Uncontrolled Keywords: | Micro-heat sink; Micro-thermoelectric generator; Metal-assisted chemical etching; Deep reactive ion etching; Surface-to-volume ratio |
| Subjects: | T Technology > TJ Mechanical engineering and machinery |
| Divisions: | Faculty of Engineering > Department of Mechanical Engineering |
| Depositing User: | Ms. Juhaida Abd Rahim |
| Date Deposited: | 27 Oct 2023 03:11 |
| Last Modified: | 27 Oct 2023 03:11 |
| URI: | http://eprints.um.edu.my/id/eprint/41688 |
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