Anuar, Afiq and Makinudin, Abdullah Haaziq Ahmad and Al-Zuhairi, Omar and Abu Bakar, Ahmad Shuhaimi and Supangat, Azzuliani (2020) Crystal quality and surface structure tuning of semi-polar (11-22) GaN on m-plane sapphire via in-situ multiple ammonia treatment. Thin Solid Films, 697. ISSN 0040-6090, DOI https://doi.org/10.1016/j.tsf.2020.137817.
Full text not available from this repository.Abstract
The crystal quality and morphological properties of semi-polar (11-22) gallium GaN were enhanced by introducing the In-Situ Multiple Ammonia Treatment (I-SMAT) method. On- and off-axis x-ray rocking curve (XRC) analysis reveals that I-SMAT would reduce several types of crystal defect namely prismatic stacking faults, basal stacking fault type I and II, and partial/perfect dislocations. By implementing an optimized flow of ammonia (NH3) and number of treated GaN pairs, the arrowhead-like features of semi-polar (11-22) GaN was effectively reduced the root mean square roughness from 4.52 to 3.07 nm. High atomic force microscopy (AFM) magnification scan demonstrated the alteration of the grain structure on the surface to become more compact and orderly arranged resulting in narrowing/shallowing of the interfacial valleys between grains. Great influence of employed I-SMAT pairs and NH3 flux was observed from XRC and AFM analysis. Conversely, excessive NH3 flux during this approach would roughen the structural and morphological properties of the semi-polar epilayer whereby the alternating thin GaN epilayer would undergo the selective-area etching to the extreme.
| Item Type: | Article |
|---|---|
| Funders: | Fundamental Research Grant Scheme [FP078-2018A], Universiti Malaya Research Grant [RP039B-18AFR], Collaborative Research in Engineering, Science and Technology Center (CREST) |
| Additional Information: | International Thin Films Conference (TACT), Taipei, TAIWAN, NOV 17-20, 2019 |
| Uncontrolled Keywords: | Gallium nitride; Semi-polar; Grain; Crystal defects; In-situ multiple ammonia treatments |
| Subjects: | Q Science > QC Physics |
| Divisions: | Faculty of Science |
| Depositing User: | Ms Zaharah Ramly |
| Date Deposited: | 05 Oct 2023 01:52 |
| Last Modified: | 05 Oct 2023 01:52 |
| URI: | http://eprints.um.edu.my/id/eprint/36830 |
Actions (login required)
 |
View Item |
