Integrating microsphere resonator and ZnO nanorods coated glass for humidity sensing application

Jali, Mohd Hafiz and Rahim, Hazli Rafis Abdul and Johari, Md Ashadi Md and Ahmad, Aminah and Yusof, Haziezol Helmi Mohd and Johari, Siti Halma and Baharom, Mohamad Faizal and Thokchom, Siddharth and Dimyati, Kaharudin and Harun, Sulaiman Wadi (2021) Integrating microsphere resonator and ZnO nanorods coated glass for humidity sensing application. Optics & Laser Technology, 143. p. 107356. ISSN 00303992, DOI https://doi.org/10.1016/j.optlastec.2021.107356.

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Official URL: https://doi.org/10.1016/j.optlastec.2021.107356

Abstract

A humidity sensor is proposed by integrating a microsphere resonator onto ZnO nanorods coated glass surface. The glass substrate was coated with ZnO nanorods for 12 h using the hydrothermal method and the microsphere was set at a diameter of 234 mu m. The proposed sensor produced sensitivity of 0.0748 dBm/%RH and 0.0142 nm/ %RH when exposed to humidity level ranging from 35 %RH to 85 %RH. Standard deviation and resolution of the proposed sensor improve by a factor of 1.7 and 2.4 respectively as compared to the straight microfiber laid on the ZnO nanorods coated glass. It utilized the ultra-high Q factor of microsphere and the changeable refractive index of the ZnO nanorods coated glass. Combination of these elements enhanced the interaction between the whispering gallery mode evanescent components with surrounds analyte. It also solves the issues pertaining to the complicated handling of microfibers during the coating process. The proposed sensor has shown exceptional experiment results for humidity sensing applications.

Item Type: Article
Funders: UNSPECIFIED
Uncontrolled Keywords: Microsphere resonator; Whispering gallery modes; Zinc oxide nanorods; Evanescent wave; Humidity sensor
Subjects: Q Science > QC Physics
Divisions: Faculty of Engineering
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 21 Feb 2022 04:59
Last Modified: 21 Feb 2022 04:59
URI: http://eprints.um.edu.my/id/eprint/26261

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