Hasikin, K. and Soin, N. and Ibrahim, F. (2009) Modeling an optical diaphragm for human pulse pressure detection. In: Advances in Microelectronics, Nanoelectronics and Optoelectronics, 30 May-1 June 2009, Istanbul, Turkey. (Submitted)
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Abstract
This paper presents the modeling of an optical diaphragm behavior for human pulse pressure detection. In this study, the comparison between the performance of the polyimide and silicon nitride diaphragm has be analyzed. The effect of diaphragm's radius and thickness on static and frequency response are also investigated. The findings show that the polyimide diaphragm is more sensitive than the silicon nitride diaphragm. The radius of the polyimide diaphragm has more effect on the deflection, sensitivity, and resonance frequency as compared to the diaphragm's thickness. It can be concluded that the polyimide diaphragm achieves the optimum performance in term of the deflection, sensitivity, and resonant frequency for human pulse pressure detection.
Item Type: | Conference or Workshop Item (Paper) |
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Funders: | UNSPECIFIED |
Uncontrolled Keywords: | Optical MEMS, Deflection, Resonance Frequency, Pressure Sensitivity, Pulse Pressure, Silicon nnitride, Polyimide, Biosensor |
Subjects: | T Technology > TA Engineering (General). Civil engineering (General) |
Divisions: | Faculty of Engineering |
Depositing User: | Mr. Mohd Samsul Ismail |
Date Deposited: | 02 Jun 2014 08:26 |
Last Modified: | 02 Jun 2014 08:26 |
URI: | http://eprints.um.edu.my/id/eprint/9919 |
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