Detection of atoms sputtered from surfaces

Graham, W.G. and Mouncey, S. and Nor, Roslan Md and Wang, L. (1995) Detection of atoms sputtered from surfaces. Key Engineering Materials, 99-100. pp. 371-376. ISSN 1013-9826

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Official URL: https://www.scientific.net/KEM.99-100.371

Abstract

The energy distributions of sputtered atoms and ions produced by few hundred to few thousand eV ion bombardment by both atomic and molecular ion beams of polycrystalline and crystalline targets by has been measured. The energy distributions of the ions and atoms are found to be different and quite complex. The distributions provide information about the basic sputtering mechanisms which occur in plasma-surface interactions.

Item Type: Article
Uncontrolled Keywords: Atoms; Crystals; Energy transfer; Ion bombardment; Plasma applications; Polycrystals; Sputtering; Surface properties; Energy distribution; Solid state physics
Subjects: Q Science > QC Physics
Divisions: Faculty of Science > Dept of Physics
Depositing User: miss munirah saadom
Date Deposited: 10 Jul 2013 04:17
Last Modified: 21 Aug 2019 08:40
URI: http://eprints.um.edu.my/id/eprint/7853

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