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Abd Samad, Muhammad Izzuddin and Noor, Mimiwaty Mohd and Nayan, Nafarizal and Abu Bakar, Ahmad Shuhaimi and Mansor, Marwan and Zuhdi, Ahmad Wafi Mahmood and Hamzah, Azrul Azlan and Latif, Rhonira (2023) Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films. Scripta Materialia, 226. ISSN 1359-6462, DOI https://doi.org/10.1016/j.scriptamat.2022.115228.