Crystallite size and microstrain: XRD line broadening analysis of AgSiN thin films

Mohamad Zaidi, Umi Zalilah and Bushroa, Abdul Razak and Ghahnavyeh, Reza Rahbari and Mahmoodian, Reza (2019) Crystallite size and microstrain: XRD line broadening analysis of AgSiN thin films. Pigment & Resin Technology, 48 (6). pp. 473-480. ISSN 0369-9420, DOI

Full text not available from this repository.
Official URL:


Purpose: This paper aims to determine the crystallite size and microstrain values of AgSiN thin films using potential approach called approximation method. This method can be used as a replacement for other determination methods such as Williamson-Hall (W-H) plot and Warren-Averbach analysis. Design/methodology/approach: The monolayer AgSiN thin films on Ti6Al4V alloy were fabricated using magnetron sputtering technique. To evaluate the crystallite size and microstrain values, the thin films were deposited under different bias voltage (−75, −150 and −200 V). X-ray diffraction (XRD) broadening profile along with approximation method were used to determine the crystallite size and microstrain values. The reliability of the method was proved by comparing it with scanning electron microscopy graph and W-H plot method. The second parameters’ microstrain obtained was used to project the residual stress present in the thin films. Further discussion on the thin films was done by relating the residual stress with the adhesion strength and the thickness of the films. Findings: XRD-approximation method results revealed that the crystallite size values obtained from the method were in a good agreement when it is compared with Scherer formula and W-H method. Meanwhile, the calculations for thin films corresponding residual stresses were correlated well with scratch adhesion critical loads with the lowest residual stress was noted for sample with lowest microstrain and has thickest thickness among the three samples. Practical implications: The fabricated thin films were intended to be used in antibacterial applications. Originality/value: Up to the knowledge from literature review, there are no reports on depositing AgSiN on Ti6Al4V alloy via magnetron sputtering to elucidate the crystallite size and microstrain properties using the approximation method. © 2018, Emerald Publishing Limited.

Item Type: Article
Uncontrolled Keywords: AgSiN thin films; Crystallite size; Microstrain; XRD-approximation method
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Engineering
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 12 Mar 2020 01:06
Last Modified: 12 Mar 2020 01:06

Actions (login required)

View Item View Item