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Tehrani, F.S. and Badaruddin, M.R. and Rahbari, R.G. and Muhamad, M.R. and Rahman, S.A. (2012) Low-pressure synthesis and characterization of multiphase SiC by HWCVD using CH4/SiH4. Vacuum, 86 (8). pp. 1150-1154. ISSN 0042-207X, DOI https://doi.org/10.1016/j.vacuum.2011.10.022.
Badaruddin, M.R. and Muhamad, M.R. and Rahman, S.A. (2011) Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition. Thin Solid Films, 519 (15). pp. 5082-5085. ISSN 0040-6090, DOI https://doi.org/10.1016/j.tsf.2011.01.133.
