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Annuar, N.Z.M. and Sabri, M.F.M. and Abu Bakar, A.S. (2015) Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 21 (1). pp. 309-318. ISSN 0946-7076