Microelectrode fabrication using Indium Tin Oxide (ITO) for microfluidic devices employing dielectrophoresis

Kadri, N.A. and Hoettges, K.F. and Hughes, M.P. (2008) Microelectrode fabrication using Indium Tin Oxide (ITO) for microfluidic devices employing dielectrophoresis. Biomeds, 21 IFM. pp. 719-722. ISSN 16800737 (ISSN)

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Abstract

Dielectrophoresis (DEP) has been widely employed as one of the techniques in developing various micro-electromechanical systems (MEMS). The manipulation of particles using DEP forces is dependent upon the particles' dipole moment that is produced in the presence of an electric field gradient. The paper documents the fabrication processes employed at the University of Surrey in developing the microelectrodes to be used in generating the said field gradient. © 2008 Springer-Verlag.

Item Type: Article
Additional Information: Conference code: 82241 Export Date: 11 December 2012 Source: Scopus doi: 10.1007/978-3-540-69139-6-179 Language of Original Document: English Correspondence Address: Kadri, N. A.; University of Surrey, Centre of Biomedical Engineering, Guildford, Surrey, United Kingdom; email: n.kadri@surrey.ac.uk References: Pethig, R., Markx, G.H., Applications of dielectrophoresis in biotechnology (1997) Trends Biotechnol, 15, pp. 426-432; Ramos, A., Morgan, H., Green, N.G., Castellanos, A., Ac electrokinetics: A review of forces in microelectrode structures (1998) Journal of Physics D: Applied Physics, 31 (18), pp. 2338-2353. , PII S0022372798902509; Green, N.G., Ramos, A., Morgan, H., AC electrokinetics: A survey of submicrometre particle dynamics (2000) J Phys D: Appl Phys, 33, pp. 632-641; Hughes, M.P., AC electrokinetics: Applications for nanotechnology (2000) Nanotechnology, 11, pp. 124-132; Fiedler, S., Shirley, S.G., Schnelle, T., Fuhr, G., Dielectrophoretic sorting of particles and cells in a microsystem (1998) Analytical Chemistry, 70 (9), pp. 1909-1915; Wang, X.B., Huang, Y., Gascoyne, P.R.C., Dielectrophoretic manipulation of particles (1997) IEEE Trans Industry Appl, 33, pp. 660-669; Schnelle, T., Muller, T., Gradl, G., Paired microelectrode system: Dielectrophoretic particle sorting and force calibration (1999) J Electrostatics, 47, pp. 121-132
Uncontrolled Keywords: Dielectrophoresis indium tin oxide lab on a chip Microelectrode DEP force Electric field gradients Fabrication process Field gradient Micro-fluidic devices Microelectrode fabrication Microelectromechanical systems Paper documents University of Surrey Biomedical engineering Electric fields Electrophoresis Indium Indium compounds Microelectrodes Microelectromechanical devices Surface defects Tin Tin oxides Conductive films
Subjects: T Technology > T Technology (General)
Divisions: Faculty of Engineering
Depositing User: Mr. Mohammed Salim Abd Rahman
Date Deposited: 07 Mar 2013 04:12
Last Modified: 07 Apr 2015 23:56
URI: http://eprints.um.edu.my/id/eprint/5057

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