Nur-E-Alam, Mohammad and Maurya, Devendra Kumar and Yap, Boon Kar and Rajabi, Armin and Doroody, Camellia and Bin Mohamed, Hassan and Khandaker, Mayeen Uddin and Islam, Mohammad Aminul and Kiong Tiong, Sieh (2023) Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress. Sensors, 23 (19). ISSN 1424-8220, DOI https://doi.org/10.3390/s23198194.
Full text not available from this repository.Abstract
In the last several decades, metal oxide thin films have attracted significant attention for the development of various existing and emerging technological applications, including pH sensors. The mandate for consistent and precise pH sensing techniques has been increasing across various fields, including environmental monitoring, biotechnology, food and agricultural industries, and medical diagnostics. Metal oxide thin films grown using physical vapor deposition (PVD) with precise control over film thickness, composition, and morphology are beneficial for pH sensing applications such as enhancing pH sensitivity and stability, quicker response, repeatability, and compatibility with miniaturization. Various PVD techniques, including sputtering, evaporation, and ion beam deposition, used to fabricate thin films for tailoring materials' properties for the advanced design and development of high-performing pH sensors, have been explored worldwide by many research groups. In addition, various thin film materials have also been investigated, including metal oxides, nitrides, and nanostructured films, to make very robust pH sensing electrodes with higher pH sensing performance. The development of novel materials and structures has enabled higher sensitivity, improved selectivity, and enhanced durability in harsh pH environments. The last decade has witnessed significant advancements in PVD thin films for pH sensing applications. The combination of precise film deposition techniques, novel materials, and surface functionalization strategies has led to improved pH sensing performance, making PVD thin films a promising choice for future pH sensing technologies.
| Item Type: | Article |
|---|---|
| Funders: | Tenaga Nasional Berhad (TNB), UNITEN through the Ministry of Higher Education of Malaysia (MOHE) (2022003HICOE) ; (J510050002-IC-6 BOLDREFRESH2025) ; (202203005ETG) |
| Uncontrolled Keywords: | thin film; metal oxide; pH sensor; sensitivity |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Engineering > Department of Electrical Engineering |
| Depositing User: | Ms. Juhaida Abd Rahim |
| Date Deposited: | 27 Oct 2025 07:51 |
| Last Modified: | 27 Oct 2025 07:51 |
| URI: | http://eprints.um.edu.my/id/eprint/50141 |
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