Abd Rahman, Mohd Nazri and Zuhdi, Ahmad Wafi Mahmood and Amirulddin, Ungku Anisa Ungku and Isah, Mustapha and Azman, Nurul Izzati and Arsad, Akmal Zaini and Arzaee, Nurul Affiqah and Mansor, Marwan and Shuhaimi, Ahmad (2024) Effect of deposition regime transition on the properties of Al:ZnO transparent conducting oxide layer by radio frequency magnetron sputtering system. Ceramics International, 50 (21, B). pp. 43070-43081. ISSN 0272-8842, DOI https://doi.org/10.1016/j.ceramint.2024.08.158.
Full text not available from this repository.Abstract
High-quality zinc oxide thin films doped with aluminium adatoms have effectively been fabricated on pristine soda-lime silica glass substrates via radio frequency magnetron sputtering system. The deposition temperature was varied to explore the impact of deposition regime transition of as-deposited Al:ZnO thin films on their performance as transparent conducting oxide layers. In particular, the depositions were conducted at room temperature, 100 C-degrees, 200 C-degrees, and 300( degrees)C, allowing for a comprehensive assessment of the resulting films. The Raman spectra depicted the modulation of Raman bands in correlation with the deposition regime transition, illustrating the impact of thermal induction on various properties of the as-deposited aluminium-doped zinc oxide thin films. Atomic force microscopy reveals the transformation from nearly spherical to elongated shape structure was obtained as the deposition process shifted from kinetic limited to thermodynamic limited regimes. The phase analysis and grazing incident of x-ray diffractometer disclose a single crystal orientation has been achieved at thermodynamic limited regime. However, two different crystal planes were predominant comparing between the surface and structural of as-deposited aluminium-doped zinc oxide thin films. It is also evident that a highly transparent with low lattice strain and better carrier concentrations of as-deposited aluminium-doped zinc oxide thin films were realized at thermodynamic limited regimes.
| Item Type: | Article |
|---|---|
| Funders: | Hajah Patimah Mohd Yusoff, Nanorian Technologies SDN BHD, Tenaga Nasional Berhad, Collaborative Research in Engineering, Science and Technology Centre, Ministry of Higher Education, Malaysia, III-Nitirdes [Grant no. A305-KR-AKH002-0000000431-K134], Universiti Tenaga Nasional [Grant no. J510050960], Kementerian Sains, Teknologi dan Inovasi [Grant no. PV007-2019/T13C2-17, PV015-2015], Power Electronics Modules [Grant no. MOSTI005-2021SRF/SRF-APP PG1-P3] |
| Uncontrolled Keywords: | Handling Editor: P. Vincenzini; Energy; Aluminium zinc oxide; Deposition regime transition; Vertical deposition; Lateral deposition; Kinetic limited regime; Thermodynamic limited regime |
| Subjects: | Q Science > QC Physics T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Science > Department of Physics |
| Depositing User: | Ms. Juhaida Abd Rahim |
| Date Deposited: | 26 Oct 2025 03:29 |
| Last Modified: | 26 Oct 2025 03:29 |
| URI: | http://eprints.um.edu.my/id/eprint/46441 |
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