Enhanced sensitivity of zinc phthalocyanine-based microporous humidity sensors by varying size of electrode gaps

Safian, Nur Azmina Mohamed and Anuar, Afiq and Omar, Al-Zuhairi and Bawazeer, Tahani M. and Alsenany, Nourah and Alsoufi, Mohammad S. and Supangat, Azzuliani and Roslan, Nur Adilah (2021) Enhanced sensitivity of zinc phthalocyanine-based microporous humidity sensors by varying size of electrode gaps. Sensors and Actuators B-Chemical, 343. ISSN 0925-4005, DOI https://doi.org/10.1016/j.snb.2021.130158.

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Abstract

The use of organic materials has become an increasingly important issue in sensing devices in recent times. Phthalocyanine is among the most promising materials in this undertaking. Zinc phthalocyanine (ZnPc) based microporous device was fabricated and its capacitance was utilized as the sensing mechanism for a humidity sensor. The effect of the electrode gap of the device on the electrical properties was investigated along with the correlation between the device's performances and the morphology of the sensing film. Using the solutionprocessed spin coating method, the capacitive type humidity sensor devices have been fabricated in a planar geometry of Al/ZnPc/Al with the presence of a microporous template. The size of electrode gaps measured with a surface profiler was 53.00 +/- 0.06 mu m, 119.00 +/- 0.03 mu m and 286.00 +/- 0.01 mu m. The surface morphology was characterized by using transmission electron microscopy (TEM), field emission scanning electron microscopy (FESEM) and X-ray photoelectron spectroscopy (XPS). Analysis of the experimental results showed that the device with the shortest electrode gap (53.00 mu m) produced the best sensitivity of 1.03 +/- 0.04 pF/%RH than that of the longer gaps. Additionally, hysteresis as well as response and recovery performances have also been investigated.

Item Type: Article
Funders: Ministry of Higher Education Malaysia under the Fundamental Research Grant Scheme[FP078-2018A], University of Malaya under the RU grant[GPF080A-2020], Synchrotron Light Research Institute, Thailand
Uncontrolled Keywords: ZnPc;Organic;Microporous;Electrode gaps;Humidity sensor
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
Q Science > QD Chemistry
Divisions: Faculty of Science
Depositing User: Ms Zaharah Ramly
Date Deposited: 22 Jul 2022 05:08
Last Modified: 22 Jul 2022 05:08
URI: http://eprints.um.edu.my/id/eprint/33890

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