The crystallographic quality and band-edge transition of as-deposited PALE AlN films via metal organic chemical vapor deposition

Abd Rahman, Mohd Nazri and Shuhaimi, Ahmad and Seng, Ooi Chong and Tan, Gary and Anuar, Afiq and Talik, Noor Azrina and Abdul Khudus, Muhammad Imran Mustafa and Chanlek, Narong and Abd Majid, Wan Haliza (2021) The crystallographic quality and band-edge transition of as-deposited PALE AlN films via metal organic chemical vapor deposition. Journal of Materials Science: Materials in Electronics, 32 (3). pp. 3211-3221. ISSN 0957-4522

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Official URL: https://doi.org/10.1007/s10854-020-05070-3

Abstract

Diversification of pulse cycle numbers proportional to the AlN films thickness using PALE technique on c-plane sapphire substrate were carried out via MOCVD. It was experiential that the structural features of as-deposited AlN films were significantly impinged on the film thickness where the highest number of pulse cycles (1050 pairs) present the lowest (0 0 0 2)-symmetry and (1 0–1 2)-asymmetry XRC analysis, manifest a decrease of threaded dislocation density. The XPS spectra present a low foreign impurities inclusion on the AlN film surface was achieved even at highest cycle number by engaging the PALE growth technique. The spectroscopy of PL and UV–Vis NIR were employed to probe the optical characteristics involving the absorption and their band-edge transitions. In both optical spectroscopies, the room temperature of band-edge emission lines has expressed a significant interconnection between the structural and optical quality of as-deposited AlN films at different pulse cycle numbers. © 2021, The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature.

Item Type: Article
Uncontrolled Keywords: III-V semiconductors; Metallorganic chemical vapor deposition; Organic chemicals; Organometallics; Sapphire
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
Divisions: Faculty of Science > Dept of Physics
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 25 May 2021 02:47
Last Modified: 25 May 2021 02:47
URI: http://eprints.um.edu.my/id/eprint/25974

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