Zhao, Fan and Wang, Yidian and Guo, Weilian and Cong, Jia and Tee, Clarence Augustine Teck Huo and Song, Le and Zheng, Yelong (2020) Analysis of the eight parameter variation of the resonant tunneling diode (RTD) in the rapid thermal annealing process with resistance compensation effect. AIP Advances, 10 (3). 035103. ISSN 2158-3226, DOI https://doi.org/10.1063/1.5133899.
Full text not available from this repository.Abstract
The rapid thermal annealing process is a key technology to control the parameters of the resonant tunneling diode (RTD) and to achieve high performance for the device. In this paper, the rapid thermal annealing process on the planar RTD has been investigated experimentally. In the experiment, the annealing sample chips of different annealed times have been recorded from the annealing equipment and their I-V characteristics have been measured accordingly. From the I-V characteristics, the negative resistance and the series resistance of the RTD can be obtained. Thus, the relationship between these parameters and annealing time can be established. Finally, by analyzing the concept of the resistance compensation effect, this study explains fully and in detail the dependency of the RTD parameter variation on the annealing time. VP and Vi are significantly reduced, greatly lowering RS, which in return also reduces the heat loss of the circuit and the power consumption of the RTD digital circuits as well as the RTD terahertz oscillator. As VV decreases, negative resistance RN is increased, and thus, the output power of the RTD terahertz oscillator is increased. These results are very useful in the study of RTD devices and fabrication technology. © 2020 Author(s).
| Item Type: | Article |
|---|---|
| Funders: | National Natural Science Foundation of China (Grant Nos. 61331003 and 51425502), Tianjin Natural Science Foundation (Grant Nos. 18JCQNJC04800 and 18JCZDJC31800) |
| Uncontrolled Keywords: | Negative resistance; Oscillators (electronic); Rapid thermal annealing; Resonant tunneling; Temperature measuring instruments |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Engineering |
| Depositing User: | Ms. Juhaida Abd Rahim |
| Date Deposited: | 03 Jun 2020 01:16 |
| Last Modified: | 03 Jun 2020 01:16 |
| URI: | http://eprints.um.edu.my/id/eprint/24560 |
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