Development of plasma technology at the University of Malaya

Wong, C.S.; Moo, S.P.; Chew, A.C.; Lee, S. (1999) Development of plasma technology at the University of Malaya. Jurnal Fizik Malaysia, 19 (3). pp. 61-67. ISSN 0128-0333

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Abstract

In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments.

Item Type: Article
Creators:
  1. Wong, C.S.(University of Malaya)
  2. Moo, S.P.(University of Malaya)
  3. Chew, A.C.(University of Malaya)
  4. Lee, S.(University of Malaya)
Journal or Publication Title: Jurnal Fizik Malaysia
Additional Information: University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory
Uncontrolled Keywords: Plasma Technology
Subjects: Q Science > QA Mathematics > QA75 Electronic computers. Computer science
Divisions: Faculty of Medicine
Depositing User: Mr. Faizal Hamzah
Date Deposited: 07 Sep 2011 08:55
Last Modified: 07 Sep 2011 09:21
URI: http://eprints.um.edu.my/id/eprint/2090

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